Oxidation, defects and vacancy diffusion in silicon

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Philosophical Magazine 20 (167):881-893 (1969)
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10.1080/14786436908228058

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Citations of this work

Dislocation networks in phosphorus-implanted silicon.Masao Tamuka - 1977 - Philosophical Magazine 35 (3):663-691.
The effect of oxidation on anomalous diffusion in silicon.P. S. Dobson - 1971 - Philosophical Magazine 24 (189):567-576.

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