Abstract

Copyright © 2015 by ASME.This paper replaces the hinged pivots of an eight-bar linkage with flexure joints in order to achieve a flexure-connected linkage system that guides rectilinear movement of its end-effector. The goal is a linkage design that can be reduced in size to provide a suspension for the proof masses of a MEMS gyroscope. The symmetric design of the linkage and its long travel relative to other MEMS suspensions has the potential to provide a number of advantages, such as the reduction of quadrature error. The design presented yields 0.1% deviation over its range of movement. An example also presents the driving linkage of the MEMS gyroscope, which is also designed as flexure connected linkage.